Photoacoustic Spectroscopy
CEA-Leti
CEA-Leti has developed a photoacoustic spectroscopy technology for the monitoring of dangerous chemical emissions and traces of gas.
The technology could reduce the cost and the size of these systems by a factor of 10 or more compared to existing tools. The system includes a fully integrated microelectromechanical system microphone dedicated to photoacoustic gas detection. It can be easily integrated into the fabrication process.
https://www.leti-cea.com
/Buyers_Guide/CEA-Leti/c24495