POSITIONING STAGE
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
The P-733.3CD three-axis nanopositioning/scanning stage launched by PI (Physik Instrumente) LP features travel ranges of 100 × 100 μm in the X and Y directions and 10 μm in the Z direction, and a 50 × 50-mm clear aperture for transmitted-light applications. Capacitive nanomeasuring sensors read the plat-form position directly and without physical contact, making them friction- and hysteresis-free and resulting in linearity of up to 99.99% with 0.1-nm resolution. The parallel metrology configuration measures all axes against the same fixed reference, providing better precision than that achieved by serial metrology. Applications include scanning microscopy, nanomanipulation, semiconductor testing, and mask and wafer positioning.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: October 2007
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required