OPC Analyzer
Fractilia LLCRequest Info
The FAME™ OPC from Fractilia is an optical proximity correction (OPC) measurement and analysis tool that can be used in semiconductor chip manufacturing. Available as a stand-alone product or as an add-on, the analyzer measures and subtracts random and systematic errors from SEM images to provide measurements of what is on the wafer rather than what is on the images. The FAME OPC measures all major stochastic effects simultaneously, including LER, LWR, LCDU, LEPE, and stochastic defects, as well as providing CD and other distance measurements.
https://www.fractilia.com
/Buyers_Guide/Fractilia_LLC/c33459
Published: June 2024
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