Nanoscale IR Spectroscopy System
Park Systems Corp.Request Info
SEOUL, South Korea, Jan. 23, 2023 — 
The Park NX-IR R300 nanoscale IR spectroscopy system from Park Systems Corp. joins with atomic force microscopy for up to 300-mm semiconductor wafers.
It provides chemical property information as well as mechanical and topographical data for semiconductor research, failure analysis, and defect characterization at high nano resolution. Photo-induced force microscopy spectroscopy provides chemical identification at <10-nm spatial resolution. It uses a noncontact technique for damage-free spectroscopy probing, high resolution, and accuracy throughout scans. Users obtain spectroscopy information at varying depths for insight into sample composition.
https://www.parksystems.com
/Buyers_Guide/Park_Systems_Corp/c18079
Published: January 2023
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