Multi-Ion-Beam Tool
Carl Zeiss Spectroscopy GmbHRequest Info
The ORION NanoFab is being introduced by Carl Zeiss Microscopy GmbH. The multi-ion-beam tool based on gas field ion source technology is an enhancement to the existing helium ion microscope and also uses neon ions. The system provides sub-10-nm nanofabrication and subnanometer-spatial-resolution imaging for industry, government and academic research laboratories. An optional gallium focused ion beam column can be integrated.
The high depth of field enables study of carbon-based materials and co-polymers and offers options for a variety of advanced microanalytical techniques.
The neon ion beam’s precise machining and nanofabrication abilities are the result of higher sputter yields in ion-beam milling and faster resist exposure in ion-beam lithography.
The evolution to this generation of helium-neon-gallium tool opens possibilities for multiscale nanofabrication.
https://www.zeiss.com/spectroscopy
/Buyers_Guide/Carl_Zeiss_Spectroscopy_GmbH/c16323
Published: September 2012
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Carl Zeiss Spectroscopy GmbH by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required