Mechatronic Calotte Loader
mechatronic systemtechnik GmbHRequest Info
The mWL.cs mechatronic calotte loader from mechatronic systemtechnik GmbH is an automated, standalone system for transferring wafers between cassettes and calottes.
The mWL.cs provides integrated device manufacturers with an opportunity to increase yield and improve process traceability at a high throughput. It provides hand-off position measurement and auto-teaching capabilities of <50 µm, along with host notification of wafer ID, cassette ID, segment ID, and position in the segment for improved process traceability. Two loading areas allow for continuous processing.
https://www.mechatronic.at
/Buyers_Guide/mechatronic_systemtechnik_GmbH/c32645
Published: February 2021
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