MEASURING SYSTEM
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
Physik Instrumente GmbH & Co. presents its family of capacitive displacement sensing systems for static and dynamic measurements. With a resolution <0.1 nm and a range of 15 to 500 µm, the systems are designed for applications in optics, semiconductor manufacturing and testing, scanning microscopy, interferometry, micropositioning and microlithography. They include a standard electronic module and a pair of sensors, which can be exchanged to vary the measurement range without recalibration.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: February 2000
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