Lithography System
EV Group (EVG)Request Info
The LITHOSCALE XT from EV Group is a high-throughput/high-resolution digital lithography solution for high-volume-manufacturing heterogeneous integration applications. The system has a dual-stage design with six exposure units and a dual-wavelength direct laser source. LITHOSCALE XT is designed for applications involving multi-die patterning, fan-out wafer-level packaging for AI and high-performance computing devices, panel-level packaging, MEMS, advanced imaging sensors, and die traceability for security and automotive applications.
https://www.evgroup.com
/Buyers-Guide/EV-Group-EVG/c4622
Published: June 2025
From the Photonics Marketplace
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