Ion Beam Patterning of Slanted SRGs
scia Systems GmbHRequest Info
Ion beam processes are perfe
ct
for etching slanted surface relief
gratings (SRG) either directly into
waveguides or into master stamps
for NIL. scia Systems’ RIBE process
creates SRGs with constant slant
angles, using reactive gases to
control material selectivity and etch
rate. Substrates are tilted to achieve
the desired angle and structure
design. By using reactive ion beam trimming, slant angle and etching
depth across the substrate can vary.
https://www.scia-systems.com
/Buyers_Guide/scia_Systems_GmbH/c30837
Published: January 2025
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