In-Line Particle Sensor
CyberOptics Corp.Request Info
MINNEAPOLIS, March 13, 2020 — 
The In-Line Particle Sensor™ (IPS™) from CyberOptics® Corp. features CyberSpectrum™ software to constantly detect particles in gas and vacuum lines in semiconductor process equipment.
The IPS quickly identifies, monitors, and enables troubleshooting of particles down to 0.1 µm. It can be installed in any gas or vacuum system, and is particularly relevant for extreme UV lithography tools where the ability to monitor particles in-line can significantly improve tool yield and productivity.
https://www.cyberoptics.com
/Buyers_Guide/CyberOptics_Corp/c3317
Published: March 2020
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