High-Reflectance Coating
Teledyne Acton OpticsRequest Info
ACTON, Mass., July 31, 2015 — 
Acton Optics & Coatings, part of Princeton Instruments Inc., has announced the 193-nm XL high-reflectance coating for low-fluence, high-repetition-rate excimer laser applications.
The multilayer dielectric coating features a ≥96 percent (45° angle of incidence) to ≥97 percent reflectance (normal incidence) at 193 nm. It combines a hybrid structure with balanced stress, optimized for excimer laser repetition rates of 4 to 5 kHz.
The possibility of catastrophic damage due to microdefects and thermal stress fractures is reduced, while dehydration effects from high-repetition operation are prevented.
The coating can be applied to Acton standard mirror blanks, custom substrates and customer-supplied material. Applications include semiconductor R&D, testing, micromachining and materials processing.
https://www.actonoptics.com
/Buyers_Guide/Teledyne_Acton_Optics/c17589
Published: July 2015
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Teledyne Acton Optics by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required