HELIOS 1200 300-mm Sputter Tool
Buhler Inc., Business Area Leybold OpticsRequest Info
The HELIOS 1200 is the latest
development of our renowned
sputter tool for fully automated
manufacture of demanding
optical interference filters. The
system addresses the market
demand for coating tools for
300-mm wafer substrates for
opto-semiconductor applications.
High throughput and
yield are achieved through high
deposition rate, excellent uniformity, and in situ control of layer
thickness by optical monitoring.
https://www.buhlergroup.com
/Buyers_Guide/Buhler_Inc_Business_Area_Leybold_Optics/c8437
Published: January 2021
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