Electrodeless EUV Light Source
Energetiq Technology Inc.Request Info
WILMINGTON, Mass., Oct. 4, 2024 — 
The EQS-10 from Energetiq Technology is an electrodeless Z-Pinch™ EUV light source for EUV applications, including EUV metrology, resist development, and defect inspection. Designed with solid-state switching technology, the light source delivers up to four times the energy per pulse with an operating frequency of up to 5 kHz. The EQS-10 also features the company’s direct fueling system, which can reduce gas consumption by up to 60%.
https://www.energetiq.com
/Buyers_Guide/Energetiq_Technology_Inc/c17537
Published: October 2024
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