EUV Flat Mirrors

Edmund OpticsRequest Info

Extreme UV (EUV) Flat Mirrors from Edmund Optics Inc. are precision polished, multilayer devices designed for maximum achievable reflectance at the design wavelength and angle of incidence.

The mirrors are designed for EUV beam steering and harmonic separation applications. They are available in 5° and 45° AOI versions and feature nearly ideal reflectivity at 13.5 nm, the wavelength of highest reflectivity available in the EUV spectrum. The RoHS-compliant mirrors offer a coating deposited on a superpolished single-crystal silicon substrate for superior thermal stability. Exhibiting a surface roughness of <3A RMS, the EUV mirrors greatly reduce scatter of incident light.

Applications include coherent diffractive imaging and materials science research.

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Published: November 2018

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