Confocal Height Sensor
MKS/NewportRequest Info
Newport Corp. has announced the availability of a chromatic confocal
height sensor for use with its MRSI dispense systems. The sensor allows measurement
on a single axis, providing access to deep cavities, confined spaces and areas that
are close to walls and other obstructions. This tool is suitable for radio-frequency
and microwave packages, where measurement using traditional reflective laser height-sensing
techniques is difficult. An LED light source with a sensor spot size of 50 μm
in diameter provides nanoresolution that is nearly target-independent. The device
allows accurate measurement of glass, semiconductor materials and mirrored surfaces.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: December 2010
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