Clean Room Rotary System

IntelLiDrives Inc.Request Info

The XY-ROTARY system from IntelLiDrives Inc. is an integrated clean room system that addresses the needs of scanning microscopy, wafer and printed circuit board inspection, semiconductor manufacturing, and other applications.

Precise, fine positioning and control is achieved with servo controllers compatible with EtherCAT, CANOpen, RS-232, USB, and Ethernet/IP interfaces. The stages are fitted with a direct drive linear and rotary axis for smooth scanning applications and fast index motions with quick settling time. It features a Y stroke of 100, 200, or 300 mm; 360° rotation, XY repeatability of 0.25 μm; rotary repeatability of 0.5 arcseconds; and a resolution of 0.1 μm.

High-resolution linear and rotary ring absolute encoders offer repeatability and stability over a range of operating conditions.

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Published: October 2019

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