Automated Resist Processing System
EV Group (EVG)Request Info
The 200-mm version of the EVG®150 automated resist processing system from the EV Group is an optical lithography platform that includes advanced features and enhancements that provide even greater throughput, versatility, and compactness compared to its previous generation.
The EVG150 provides reliable and high-quality coating and developing processes in a universal platform that supports a variety of devices and applications including advanced packaging, microelectromechanical systems, radio frequency, 3D sensing, power electronics, and photonics. It supports the demanding needs for both high-volume production and industrial development.
https://www.evgroup.com
/Buyers_Guide/EV_Group_EVG/c4622
Published: November 2022
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