Photonics Dictionary

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

Actinic refers to the property of radiation, particularly ultraviolet (UV) light, that can cause photochemical reactions. Radiation: Actinic radiation typically involves UV light but can also...

An argon-fluoride (ArF) excimer laser is a type of ultraviolet laser that operates using a mixture of argon and fluorine gases. Excimer lasers are a class of gas lasers that emit light in the UV...

A deep-ultraviolet (DUV) laser is a type of laser that emits light in the deep ultraviolet region of the electromagnetic spectrum, typically with wavelengths ranging from about 200 nm down to 10 nm....

An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium...

Fused quartz and silica are closely related materials, both composed primarily of silicon dioxide (SiO2), but they are produced through different manufacturing processes and have distinct properties...

1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture tube. 2. In photolithography, a photomask (or mask) is typically a patterned...

A technique used in photolithography of computer chips to compensate for errors caused by the proximity effect, which results in variations in size between areas of the mask that have many small...

In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...

Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...

Microelectromechanical systems, or MEMS, refer to miniature devices or systems that integrate mechanical and electrical components at a microscale. These systems combine elements such as sensors,...

In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...

In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.

A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in photolithography.

In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...