Photonics Dictionary

An argon-fluoride (ArF) excimer laser is a type of ultraviolet laser that operates using a mixture of argon and fluorine gases. Excimer lasers are a class of gas lasers that emit light in the UV...

A beam shaper is an optical device or system designed to modify the spatial profile or intensity distribution of a laser or light beam. The goal is to transform the incoming beam into a desired shape...

Optical elements, often created by micromachining, lithography or vacuum deposition, that rely on diffraction of the collected energy as opposed to the more common refracting or reflecting optics....

Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can...

A deep-ultraviolet (DUV) laser is a type of laser that emits light in the deep ultraviolet region of the electromagnetic spectrum, typically with wavelengths ranging from about 200 nm down to 10 nm....

An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...

An electron-gun system is an assembly used to generate and control a focused beam of electrons. Electron guns find applications in various fields, including cathode ray tubes (CRTs), electron...

An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium...

Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which...

In photonics, a lattice refers to a periodic arrangement of optical elements or structures, often on a microscopic or nanoscopic scale. These optical lattices can be created using various techniques...

Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of...

In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...

Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...

Microelectromechanical systems, or MEMS, refer to miniature devices or systems that integrate mechanical and electrical components at a microscale. These systems combine elements such as sensors,...

A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.

Nanopositioning refers to the precise and controlled movement or manipulation of objects or components at the nanometer scale. This technology enables the positioning of objects with extremely high...

In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

Ultraviolet (UV) coatings are specialized optical coatings designed to operate in the ultraviolet region of the electromagnetic spectrum, typically ranging from 10 nm to 400 nm. These coatings are...

In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...