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Glossary
surface profile
A representation of the shape of a surface, including any roughness or other irregularities. The profile can be generated by direct measurements, as by a stylus, or by remote measurement, as by an interferometer.
interferometer
An interferometer is a scientific instrument that utilizes the principle of interference to measure differences in the path length, wavelength, phase, or amplitude of coherent electromagnetic waves. It typically consists of components such as a...
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