Definition of ion-assisted deposition

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Optimax Systems, Inc. - Ultrafast Coatings 2024 LB

Photonics Dictionary

ion-assisted deposition: A technique for improving the structure density of thin-film coatings by bombarding the growing film with accelerated ions of oxygen and argon. The kinetic energy then dissipates in the film, causing the condensed molecules to rearrange at greater density.

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