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< Optomechanics & Positioning
Hexapods
Hexapod
Applications
Biomedical/Medical
Fiber Optic Alignment
Industrial
Metrology
Microscopy
Nanopositioning
Other
Scientific Research
Max. Load
-
g
kg
Mass
-
g
kg
Height
-
mm
cm
X-Axis Range
-
mm
cm
Y-Axis Range
-
mm
cm
Z-Axis Range
-
mm
cm
Max. Linear Speed
-
nm/s
mm/s
cm/s
m/s
Max. Rotation Speed (degrees/s)
-
Key Suppliers
Aerotech Inc.
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
SmarAct Inc.
20 products
Hexapods
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Hexapods x
SmarPod
SmarAct Inc.
Type:
Hexapod
Max. Load:
500g
Mass:
200g
Height:
42mm
X-Axis Range:
11mm
Y-Axis Range:
11mm
Z-Axis Range:
6mm
Non-Magnetic Materials:
Available
Smallest Increment:
1 nm
UHV Compatibility:
Yes
H-811 6-Axis Motion Miniature Hexapod
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
Type:
Hexapod
Max. Load:
5kg
Mass:
2.2kg
Height:
11cm
X-Axis Range:
34cm
Y-Axis Range:
34cm
Z-Axis Range:
21cm
H-840 High Performance High Value Hexapod
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
Type:
Hexapod
Max. Load:
40kg
Mass:
5kg
Height:
25cm
X-Axis Range:
10cm
Y-Axis Range:
10cm
Z-Axis Range:
5cm
HexGen HEX500-350HL
Aerotech Inc.
Type:
Hexapod
Max. Load:
200kg
Mass:
49kg
Height:
350mm
X-Axis Range:
100mm
Y-Axis Range:
110mm
Z-Axis Range:
54mm
Linear Accuracy:
±0.5 μm
Linear Resolution:
20 nm
Rotary Accuracy:
±2.5 μrad
HexGen HEX300-230HL
Aerotech Inc.
Type:
Hexapod
Max. Load:
45kg
Mass:
12kg
Height:
230mm
X-Axis Range:
55mm
Y-Axis Range:
60mm
Z-Axis Range:
25mm
Linear Accuracy:
±0.5 μm
Linear Resolution:
20 nm
Rotary Accuracy:
±2.5 μrad
HexGen HEX150-140HL
Aerotech Inc.
Type:
Hexapod
Max. Load:
7.5kg
Mass:
2.3kg
Height:
141mm
X-Axis Range:
40mm
Y-Axis Range:
40mm
Z-Axis Range:
16mm
Linear Accuracy:
±0.75 µm
Linear Resolution:
20 nm
Rotary Accuracy:
±7.3 µrad
H-845 Heavy-Duty Hexapod
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
Type:
Hexapod
Max. Load:
1000kg
Mass:
120kg
Height:
66cm
X-Axis Range:
3.4cm
Y-Axis Range:
3.2cm
Z-Axis Range:
1.3cm
HXP100P-MECA
MKS/Newport
Type:
Hexapod
Max. Load:
6kg
Mass:
5.6kg
Height:
20.9cm
X-Axis Range:
5.5cm
Y-Axis Range:
5cm
Z-Axis Range:
2.8cm
Min. Incremental X Motion:
0.10 µm
Min. Incremental Y Motion:
0.10 µm
Min. Incremental Z Motion:
0.05 µm
HXP200S
MKS/Newport
Type:
Hexapod
Max. Load:
85kg
Mass:
24.9kg
Height:
30cm
X-Axis Range:
80cm
Y-Axis Range:
90cm
Z-Axis Range:
5.4cm
Min. Incremental X Motion:
0.15 µm
Min. Incremental Y Motion:
0.15 µm
Min. Incremental Z Motion:
0.15 µm
HXP1000-MECA
MKS/Newport
Type:
Hexapod
Max. Load:
450kg
Mass:
25kg
Height:
395mm
X-Axis Range:
155mm
Y-Axis Range:
138mm
Z-Axis Range:
79mm
Min. Incremental X Motion:
0.30 µm
Min. Incremental Y Motion:
0.30 µm
Min. Incremental Z Motion:
0.16 µm
Hybrid Hexapods
ALIO Industries LLC
Type:
Hexapod
Max. Load:
20kg
X-Axis Range:
450cm
Y-Axis Range:
450cm
Z-Axis Range:
60cm
Max. Linear Speed:
0.5m/s
Max. Rotation Speed (degrees/s):
180
SMARPOD CLS-32, hexapod-like
SmarAct GmbH
Type:
Hexapod
Mass:
550g
Height:
54mm
X-Axis Range:
20mm
Y-Axis Range:
20mm
Z-Axis Range:
10mm
SMARPOD 110.45, hexapod-like
SmarAct GmbH
Type:
Hexapod
Mass:
400g
Height:
45mm
X-Axis Range:
20mm
Y-Axis Range:
20mm
Z-Axis Range:
10mm
HXP50-MECA
Newport Spectra-Physics GmbH, Photonics Solutions Div.
Type:
Hexapod
Max. Load:
50kg
Mass:
2kg
Height:
15cm
X-Axis Range:
17mm
Y-Axis Range:
15mm
Z-Axis Range:
7mm
ZONDA Hexapod
Symetrie
Type:
Hexapod
Max. Load:
400kg
Mass:
99kg
Height:
640cm
X-Axis Range:
200mm
Y-Axis Range:
200mm
Z-Axis Range:
150mm
Repeatability Rx, Ry, Rz:
± 2 µrad
Repeatability Tx, Ty, Tz:
± 0.5 µm
Resolution Rx, Ry, Rz:
0.5 µrad
NanoPos Hexapod
Symetrie
Type:
Hexapod
Max. Load:
500g
Mass:
505g
Height:
68mm
X-Axis Range:
5mm
Y-Axis Range:
5mm
Z-Axis Range:
4mm
Repeatability Rx, Ry, Rz:
± 2 µrad
Repeatability Tx, Ty, Tz:
± 75 nm
Resolution Rx, Ry, Rz:
1 µrad
BREVA Hexapod
Symetrie
Type:
Hexapod
Max. Load:
200kg
Mass:
36kg
Height:
350cm
X-Axis Range:
75mm
Y-Axis Range:
75mm
Z-Axis Range:
50mm
Repeatability Rx, Ry, Rz:
± 5 µrad
Repeatability Tx, Ty, Tz:
± 1 µm
Resolution Rx, Ry, Rz:
2.5 µrad
BORA Hexapod
Symetrie
Type:
Hexapod
Max. Load:
10kg
Mass:
4.3kg
Height:
145mm
X-Axis Range:
20mm
Y-Axis Range:
20mm
Z-Axis Range:
10mm
Repeatability Rx, Ry, Rz:
± 6.5 µrad
Repeatability Tx, Ty, Tz:
± 1.5 µm
Resolution Rx, Ry, Rz:
2 µrad
PUNA Hexapod
Symetrie
Type:
Hexapod
Max. Load:
25kg
Mass:
5.6kg
Height:
200cm
X-Axis Range:
30mm
Y-Axis Range:
30mm
Z-Axis Range:
20mm
Repeatability Rx, Ry, Rz:
± 6.5 µrad
Repeatability Tx, Ty, Tz:
± 1.5 µm
Resolution Rx, Ry, Rz:
5 µrad
Mini-Hexapod MHP-11
Picard Industries
Type:
Hexapod
Max. Load:
2kg
Mass:
3kg
Height:
15cm
X-Axis Range:
2.5cm
Y-Axis Range:
2.5cm
Z-Axis Range:
25cm
2 µm step size:
resolution
Hexapods Products
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