- Company: MKS/Newport
- Type: Hexapod
- Applications: Biomedical/Medical, Industrial, Scientific Research, Nanopositioning, Microscopy, Metrology, Fiber Optic Alignment, Other
- Max. Load: 6kg
- Mass: 5.6kg
- Height: 20.9cm
- X-Axis Range: 5.5cm
- Y-Axis Range: 5cm
- Z-Axis Range: 2.8cm
- Max. Linear Speed: 12mm/s
- Max. Rotation Speed (degrees/s): 16
- Min. Incremental X Motion: 0.10 µm
- Min. Incremental Y Motion: 0.10 µm
- Min. Incremental Z Motion: 0.05 µm
- X Repeatability: ±0.10 µm
- Y Repeatability: ±0.10 µm
- Z Repeatability: ±0.05 µm
High precision single device with six independent axes of motion: X, Y, Z, pitch, roll, and yaw. Light and compact design, with high stiffness.
1791 Deere Ave.
PO Box 19607
Irvine, CA 92606
United States
Phone: +1 949-863-3144
Toll-free: +1 877-835-9620