Ushio Inc. of Tokyo has acquired all shares in Xtreme technologies GmbH held by Lambda Physik AG of Göttingen, Germany. Jenoptik Laser, Optik, Systeme GmbH of Jena, Germany, continues to hold the remaining 50 percent of the shares in Xtreme, which is a supplier of high-power extreme-UV sources based in Jena and Göttingen. The partners will use Xtreme’s technologies in semiconductor mass production.