SAN JOSE, Calif., June 18 -- Ultratech Stepper Inc. has received a million-dollar order for the Saturn I stepper system from a leading Korean semiconductor manufacturer. The Saturn family of steppers is Ultratech's most advanced mix-and-match lithography system.
The Saturn I offers resolution down to 0.65 µm and a large field size of 22 mm x 44 mm, and can be matched to a 5X reduction stepper field or the new step-and-scan system field. It has a throughput of more than 80 eight-inch wafers per hour, and can provide pattern recognition features on existing products without requiring special alignment marks. The new Ultratech customer will use the system in conjunction with a leading-edge stepper already in place to produce advanced semiconductor devices such as digital signal processors and other ASIC devices.