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PI Physik Instrumente - Microscope Stages LB ROS 11/24

Therma-Wave Files Patent Infringement Suit

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FREMONT, Calif., April 30 -- Therma-Wave Inc., producer of process control metrology systems used in semiconductor manufacturing, announced it has filed a patent infringement suit against Boxer-Cross in the US District Court, Northern District of California. The suit alleges that Boxer-Cross's BX-10 product infringes certain patents held by Therma-Wave related to ion implant monitoring. Therma-Wave patents were previously found to be valid and infringed in a suit filed against Jenoptik AG in 1994. The earlier court rulings led to Jenoptik's withdrawal from the US market. Therma-Wave has asked the court to issue an injunction barring Boxer-Cross from making, using or selling its BX-10 product.

"Therma-Wave developed the basic technology found in its Therma-Probe product, which is used by all semiconductor manufacturers to monitor ion implantation," said Martin Schwartz, Therma-Wave president and CEO. "We established our proprietary position against Jenoptik, and we expect the court to enforce our patents against Boxer-Cross as well."

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Published: April 2002
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
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