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Semi-Automated Process Simplifies Production of Quantum Cascade Lasers

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In collaboration with the Fraunhofer Institute for Photonic Microsystems IPMS (Fraunhofer IPMS), the Fraunhofer Institute for Applied Solid State Physics IAF (Fraunhofer IAF) has developed a semi-automated process that simplifies the production of quantum cascade lasers (QCLs) modules. The developed models feature a micro-opto-electromechanical systems (MOEMS) grating scanner in an external optical cavity (EC).  

QCLs are high-performance laser light sources for a wide range of spectroscopy applications in the mid-infrared range. Their high brilliance enables minimal measurement times for more precise characterization processes and can be used in chemical and pharmaceutical industries, medicine or security technology. Historically however, the production of QCL modules has been relatively complex and expensive.
The developed process automates the assembly process of MOEMS-EC-QCLs in essential parts with a pick-and-place system, which significantly reduces manufacturing costs. In addition, Fraunhofer IAF developed a flexible and scalable method for efficiently combining multiple laser sources into a multi-core system. Individual QCL modules have only a limited spectral width. By combining modules with supplementary spectral ranges, application-specific multi-core systems can be configured for spectral measurement speeds of more than 1 million wavenumbers per second.

The MOEMS-EC-QCLs are characterized by broad spectral tunability in the mid-infrared wavelength range between 4 and 11 µm and high spectral brilliance and allow complete infrared spectra to be recorded in 1 ms. MOEMS-EC-QCLs can be used in semiconductor measurement technology to determine epitaxial layer thicknesses and their compositions, in process analytics to optimize chemical reactions, in process control to test coatings, in security technology to detect hazardous substances or intoxicants, and in the pharmaceutical industry for quality assurance.

The results were obtained as part of the AIRLAMet project where Fraunhofer IAF, Fraunhofer IPMS, and Sacher Lasertechnik GmbH are partnering under the coordination of sentronics metrology GmbH on a device for measuring the thickness and composition of thin functional layers in semiconductor production. The provision of a high-performance and cost-effective laser light source for the measuring system marks a first milestone on the way to achieving the project objectives, according to the Fraunhofer scientists.

Published: June 2025
Businessresearch and Technologypartnershipsquantum cascade lasersTest & MeasurementspectroscopyLaserssemiconductorschemicalpharmaceuticalmedicinesecurityFraunhofer Institute for Applied Solid State Physics IAF

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