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Ultrafast Bursts Extend Chip Lithography Below Surface

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Because semiconductors serve as the backbone of modern technologies including cellphones, cars, robots, and other devices, the continuous need for miniaturized and powerful chips is placing increased pressure on semiconductor manufacturing technologies. The dominant technology, lithography, is limited in its ability to address these challenges, given its surface-processing nature. When intense light from ultrafast lasers is focused inside a semiconductor, highly efficient nonlinear ionization along the beam path creates an opaque plasma that prevents reaching enough energy localization near...Read full article

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    Published: November 2022
    Glossary
    chip
    1. A localized fracture at the end of a cleaved optical fiber or on a glass surface. 2. An integrated circuit.
    infrared
    Infrared (IR) refers to the region of the electromagnetic spectrum with wavelengths longer than those of visible light, but shorter than those of microwaves. The infrared spectrum spans wavelengths roughly between 700 nanometers (nm) and 1 millimeter (mm). It is divided into three main subcategories: Near-infrared (NIR): Wavelengths from approximately 700 nm to 1.4 micrometers (µm). Near-infrared light is often used in telecommunications, as well as in various imaging and sensing...
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    integrated photonics
    Integrated photonics is a field of study and technology that involves the integration of optical components, such as lasers, modulators, detectors, and waveguides, on a single chip or substrate. The goal of integrated photonics is to miniaturize and consolidate optical elements in a manner similar to the integration of electronic components on a microchip in traditional integrated circuits. Key aspects of integrated photonics include: Miniaturization: Integrated photonics aims to...
    Research & TechnologyLaserssemiconductorschip3d processingultrafast laserspulseburstinfraredlithographyMaterialsphotonic integrated circuitsmanufacturingproductionEuropeLight Sourcesintegrated photonicsmicroelectronicsTechnology News

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