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Meadowlark Optics - Wave Plates 6/24 LB 2024

Scanning Impedance Probe Microscopy

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Combining resonant microwave technology with atomic force microscopy allows measurement of slight variations of capacitance, dopant density, charge distribution and dielectric properties -- limited only by the sharpness of the probe.

Wenhai Han, Agilent Technologies Inc.

Mapping physical properties of various materials at high resolution has been pursued for decades in the microscopy world, and new challenges are added by the semiconductor and materials industries, which have an increasing need to map physical properties. The development of scanning tunneling microscopy in 1982 and of atomic force microscopy (AFM) in 1986 has significantly changed the world of microscopy. A number of methods derived from these techniques have been developed to probe the physical properties of materials. For semiconductors, monitoring and controlling dopant levels — which...Read full article

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    Published: May 2008
    Glossary
    sensor
    1. A generic term for detector. 2. A complete optical/mechanical/electronic system that contains some form of radiation detector.
    Basic ScienceCommunicationsFeaturesmaterials industriesMicroscopysemiconductorssensorSensors & Detectors

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