SCOTTSDALE, Ariz., August 19 -- Although a number of significant milestones were achieved in 2002, this past year was one of the toughest for those in the microelectromechanical systems (MEMS) industry, according to a report by market research firm In-Stat/MDR. The company said that year over year, revenues grew just 4.4 percent, from $3.8 billion in 2001 to $3.9 billion in 2002, even though unit shipments increased 47.6 percent. 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