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Photoresist Enables High-Throughput, High-Resolution Nanolithography

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HANGZHOU, China, Nov. 6, 2024 — A new cationic-based photoresist can improve the production speed of two-photon lithography (TPL) without sacrificing resolution. The highly sensitive photoresist, called TP-EO (short for two-photon epoxy oligomer), was developed by a team at Zhejiang University. TPL is a powerful tool for creating complex 3D shapes at the nanoscale. It uses photoresists — materials that change their chemical properties when exposed to light — to allow precise control during the nanofabrication process. However, high-throughput TPL is problematic, especially for cationic-based...Read full article

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    Published: November 2024
    Glossary
    photoresist
    Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a crucial component in the patterning of semiconductor wafers during the manufacturing process. The primary function of photoresist is to undergo a chemical or physical change when exposed to light, making it selectively soluble or insoluble in a subsequent development step. The general...
    photolithography
    Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer geometric patterns from a photomask or reticle to a photosensitive chemical photoresist on a substrate, typically a silicon wafer. The basic steps of photolithography include: Cleaning the substrate: The substrate, often a silicon wafer, is cleaned to remove any contaminants from its surface. ...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    optoelectronics
    Optoelectronics is a branch of electronics that focuses on the study and application of devices and systems that use light and its interactions with different materials. The term "optoelectronics" is a combination of "optics" and "electronics," reflecting the interdisciplinary nature of this field. Optoelectronic devices convert electrical signals into optical signals or vice versa, making them crucial in various technologies. Some key components and applications of optoelectronics include: ...
    3d printing
    3D printing, also known as additive manufacturing (AM), is a manufacturing process that builds three-dimensional objects layer by layer from a digital model. This technology allows the creation of complex and customized structures that would be challenging or impossible with traditional manufacturing methods. The process typically involves the following key steps: Digital design: A three-dimensional digital model of the object is created using computer-aided design (CAD) software. This...
    photosensitizer
    A substance that increases a material's sensitivity to electromagnetic irradiation. In photodynamic therapy, a drug used to render a target tissue sensitive to laser light.
    Research & TechnologyeducationAsia-PacificZhejiang Universityphotoresistphotolithographytwo-photon lithographynanoMaterialsnanomaterialsnanofabricationLasersLight SourcesOpticsoptoelectronicsindustrial3d printingphotosensitizerlight-matter interactionscationic photoresists

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