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PI Physik Instrumente - Microscope Stages LB ROS 11/24

ORA Lands NIST Award for Lithography Modeling

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Optical Research Associates of Pasadena, Calif., has won a $1.7 million Advanced Technology Program award from the National Institute of Standards and Technology for the development of lithography modeling algorithms. The allotment will fund ORA's "Fundamental Algorithms for Direct Metric Tolerancing and Illumination Optimization" project, which will focus on improving the software used by industry to design and build semiconductor devices. The company views the award as an opportunity to develop modeling techniques that will bridge the gap between semiconductor manufacturing theory and...Read full article

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    Published: July 2004
    Businessindustriallight speedlithography modeling algorithmsOptical Research Associatessemiconductor devicesSoftware

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