Search
Menu
PI Physik Instrumente - Space Qualified Steering LB LW 12/24

Lucent Picks ArF Scanner from Nikon Precision

Facebook X LinkedIn Email
BELMONT, Calif., March 12 -- Nikon Precision Inc. reports that Lucent Technologies has chosen its ArF scanner for work on advanced communications semiconductors at Lucent's Bell Laboratories development facility at Cirent Semiconductor in Orlando, Fla. Nikon's high NA (0.60) scanning system met the small feature sizes of 150 nm and below planned for Lucent's new pilot line. Nikon Precision is the North American subsidiary of Nikon Corp.; Cirent Semiconductor is a manufacturing joint venture of Lucent Technologies' Microelectronics Group and Cirrus Logic, Inc.Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: March 1999
    CommunicationsindustrialNews & Features

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.