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Lambda Physik AG and Jenoptik AG Form Joint Venture for Nanotechnology Research

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GOTTINGEN, May 21 -­ Lambda Physik AG, a company listed on the Neuer Markt, has founded a joint venture with Jenoptik Laser Optik Systeme GmbH for the purpose of developing and producing radiation sources in the extreme ultraviolet range (EUV). The two companies each hold a 50 percent stake in XTREME technologies GmbH. "The founding of XTREME technologies accords with our goal of offering a four wavelength strategy (248, 193, 157, and 13.5 nm) for microlithography. The shortest wavelength up to which excimer laser technology, of which we are the leading supplier, can be used is 157 nm," said...Read full article

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    Published: May 2001
    industrialNews & Features

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