FREMONT, Calif., April 13 -- KLA-Tencor Corp. and Therma-Wave Inc. have settled all pending litigation and cross-licensed certain patents. Therma-Wave also agreed to pay an undisclosed sum to KLA-Tencor, the companies said in a joint statement. KLA-Tencor granted Therma-Wave a license on its US patent entitled "Thin Film Thickness Measuring Method." Therma-Wave granted KLA-Tencor a license to a patent called "Sample Characteristic Analysis Utilizing Multi Wavelength And Multi Angle Polarization And Magnitude Change Detection," and to two other patents under the title "Thin Film Optical Measurement System and Method With Calibrating Ellipsometer." Therma-Wave agreed to modify its products to avoid using certain technology patented by KLA-Tencor, and both parties agreed to a moratorium on any patent litigation for an undisclosed period of time.