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Opto Diode Corp. - Opto Diode 10-24 LB

Positive Light Inc.

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Indigo-DUV Laser Source

Positive Light's Indigo-DUV Laser Source Positive Light Inc. designed the Indigo-DUV all-solid-state 193-nm laser source to fill the need for an optical metrology tool for at-wavelength characterization of deep-UV optics and detectors. The device enables precision optical metrology and calibration of 193-nm lithography stepper lenses and deep-UV spectrometers.

The Los Gatos, Calif., company's design includes a Ti:sapphire oscil-lator pumped by the Evolution laser, a diode-pumped solid-state Nd:YLF laser as well as a fourth-harmonic frequency-conversion package.

The Evolution laser offers power stability with less than 1 percent rms fluctuation, resulting in power stability of less than 3 percent rms from the Indigo-DUV at 193 nm, and in diode lifetimes of more than 10,000 hours.

The Ti:sapphire oscillator is injection-seeded by a tunable narrow-linewidth external-cavity diode laser, allowing near-transform-limited linewidths for 40-ns, 772-nm output. An analog, kilohertz closed-loop control circuit provides the frequency stability, and a high-precision wavelength option controls the long-term frequency drift to subpicometer performance. Indigo-DUV produces The laser's near-transform-limited linewidth operation results in a coherence length of >3 m, enabling the precision interferometry of lens assemblies with greater than 1 m in optical path length.

Complete with a close-loop chiller, Indigo-DUV operates on 110/220 VAC and requires only a low-flow nitrogen purge.
Meadowlark Optics - Wave Plates 6/24 MR 2024

Published: January 2003
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
deep-uv opticsdetectorsFeaturesindustrialmetrologyoptical metrology toolSensors & DetectorsSpectrometersspectroscopyTi:sapphire

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