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Metrology Research

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FEI Co. of Hillsboro, Ore., a provider of atomic-scale imaging and analysis systems, has joined the Advanced Metrology Development Program at the College of Nanoscale Science and Engineering at the University at Albany-State University of New York. The program is run by Sematech, a global consortium of chipmakers. The company will collaborate with metrology experts to create tools for high-resolution imaging and compositional data at the nanometer scale for use in defect analysis.
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Published: September 2009
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
Advanced Metrology Development Programanalysisatomic-scaleBasic ScienceBusinesschipmakersCollege of Nanoscale Science and Engineeringcompositional datadefect analysisFEIhigh-resolution imagingImaginglight speedmetrologynanometer scaleSematechUniversity at Albany-State University of New York

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