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Indigo-DUV Wins Circle of Excellence Award

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LOS GATOS, Calif., Feb. 5 -- Positive Light's Indigo-DUV laser was awarded the 2002 Photonics Spectra Circle of Excellence Award at Photonics West 2003 last week.

The company said the product is the first all-solid-state, narrow linewidth 193 nm laser source for optical metrology and calibration of 193 nm lithography stepper lenses and deep-UV spectrometers.

The Photonics Circle of Excellence Awards recognize the top 25 technically innovative products in photonics markets.

The Indigo-DUV produces more than 2 mW of single-frequency radiation in a TEM00 spatial mode. The design includes a Ti:sapphire oscillator pumped by the DPSS Nd:YLF Evolution laser and a fourth harmonic frequency conversion package. The injection seeded Ti:sapphire oscillator produces near transform-limited linewidths for 40 ns, 772 nm output. A kilohertz closed-loop control circuit provides the frequency stability, and a high-precision wavelength option controls the long-term frequency drift to subpicometer performance, Positive Light said.

For more information, visit: www.poslight.com


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Published: May 2002
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
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