Wet-processing module developer Imtec Acculine Inc. has formed a new business unit, Imtec Legacy Systems, for semiconductor equipment. The new venture will be focused on the sales, refurbishment and service of semiconductor front-end equipment, as well as providing hard-to-find spare parts. Imtec will specialize in Gasonics and KLA tools, but will have the ability to work on ashers, etchers and other dry process and metrology tools. Lee Stevens will be managing sales and overseeing operations for the unit. Stevens has been working with semiconductor front-end equipment since 1979 and was operations manager at Surplus Process Equipment Corp. since 2010. Imtec has dedicated 2,500 sq ft inside its Fremont facility for the refurbishment and testing of surplus equipment. The new area will have space and facilities for working on multiple tools in a clean room environment. “We see the support of Legacy equipment as being vital to the industry and a natural complement to our wet process modules business,” said Paul Mendes, president of Imtec. “We believe this diversification will benefit our customer base and provide a platform for growth.” Imtec is a manufacturer of high-purity chemical processing equipment, megasonic systems, heated process tanks, in-line heaters and UV light shields.