YPSILANTI, Mich., Aug. 26 -- Integrated Sensing Systems Inc. (ISSYS) and its subsidiary, NanoGetters, announced that the US Patent Office has granted it a utility patent for a new method of forming vacuum and inert hermetic packages for microsensors, actuators and displays, joining the company's other patents in the area of packaging and MEMS (microelectromechanical systems) devices. Used in the majority of ISSYS's MEMS-based products and sold under the trade name NanoGetters, the material and packaging process has applications in devices such as gyroscopes, pressure sensors, flow sensors, radio frequency MEMS, displays, infrared and optical sensors, density meters and chemical concentration sensors.
For more information, visit: www.mems-issys.com or www.nanogetters.com