Gigaphoton Test KrF Excimer Laser

Semiconductor lithography light source manufacturer Gigaphoton Inc. has begun testing a new krypton fluoride (KrF) excimer laser, a light source for the annealing process at large-scale liquid crystal display manufacturing plants.

Testing is taking place within a mass production line at a panel manufacturer. Designed to be a high-output KrF excimer laser at 600 W, the product is expected to be an annealing light source for panel manufacturers both within Japan and abroad as demand for large-scale panels with even greater resolutions increases.

Gigaphoton is aiming to ship the first mass-produced models of the KrF excimer laser in the summer of 2017.

Gigaphoton is a developer of excimer laser, extreme UV and lithography light sources.

There are 13 suppliers of Excimer Lasers in the Photonics Marketplace.

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About Gigaphoton Inc.

Published: December 2016

Glossary

excimer laser: An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium used in these lasers. Excimer lasers are widely used in various industrial, medical, and scientific applications due to their ability to deliver high-energy, UV light in short pulses. Key features and characteristics of excimer lasers include: Excimer molecules: The gain medium of an excimer...