BILLERICA, Mass., August 20 -- GSI Lumonics Inc. has filed an action against Electro Scientific Industries Inc. (ESI), of Portland, Ore., for patent infringement.
The complaint, filed in California's US District Court, alleges ESI is violating three GSI Lumonics patents -- 6337462, 6181728 and 6573473 -- relating to technology used in its laser systems for processing semiconductor devices.
ESI said in a statement that it will "vigorously defend" the action.
GSI Lumonics makes laser-based manufacturing systems with a focus on the semiconductor, telecommunications and electronics industries.
ESI's laser systems are used on semiconductor memory circuits, hybrid circuits, linear devices and other electronic devices.
ESI announced yesterday it has been notified it is in compliance for continued listing on Nasdaq; effective August 21, ESI’s symbol will change from "ESIOE" to "ESIO".
For more information, visit: www.gsilumonics.com