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Coherent Debuts All-Solid-State, CW, Deep-UV Laser for Semiconductor Metrology at Semicon West

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Santa Clara, Calif., July 18 -- Coherent Laser Division (CLD) announced that it will introduce the Azure continuous-wave (CW), diode-pumped, deep-ultraviolet (UV) laser at Semicon West in San Francisco, California, July 16-18, at booth #3034. A "hands-free" 266-nm laser source, the Azure has been specifically designed for integration into semiconductor metrology tools.
"The near diffraction-limited beam of the Azure has ultra-low amplitude noise that is characteristic of a single-frequency laser source," said Terry Hannon, senior marketing manager for Coherent Laser Division. "The Azure is a complementary addition to Coherent's CW UV portfolio of products. We offer our customers the widest choice of UV wavelengths and power levels on the market."
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Published: July 2001
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
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