SANTA CLARA, Calif., July 9 -- Canon USA, Inc., Semiconductor Equipment Division has received a $100-million order from a major US chipmaker for its most advanced steppers and scanners. Our survey of chipmakers showed that there is still large market potential for high NA, high performance DUV steppers, said Phil Ware, assistant general manager and director of technical marketing for Canon USA Semiconductor Equipment Division.
Ware said Canon foresaw the need for optical extension into post optical nodes. In 1997 the company launched a reengineering program to enhance the lens quality, stage performance and throughput of its step-and-repeat and step-and-scan systems. As a result of this reengineering initiative, Canon's EX6 stepper and its newest scanners will extend into so-called NGL nodes when used with the company's IDEAL multi-level imaging.