High volume applications direct development
Robert Aronno, Daniel J. Bajuk and Laurie Conner SVG-Tinsley Laboratories and SVG Lithography
In the past, high precision aspheric optics have been produced on a "one-off" basis using highly skilled and labor intensive processes. Today, manufacturers of advanced semiconductor processing equipment are looking to incorporate aspheric surfaces in these systems to replace one or more projection optic components, resulting in a smaller, more compact optical systems. In addition, incorporating aspheres permits better optical correction for the higher numerical aperture that make smaller, faster chips.