ASML and Eindhoven University of Technology Strengthen Partnership

VELDHOVEN, Netherlands, April 27, 2023 — Existing partners ASML and Eindhoven University of Technology (TU/e) will jointly launch a 10-year strategic research road map in the fields of plasma physics, artificial intelligence, mechatronics, and semiconductor lithography. Per a memorandum of understanding signed by the parties, ASML and TU/e will invest equally in the program, which will create up to 40 Ph.D. positions annually.

The fortified partnership will additionally include construction of an ASML research facility on the TU/e campus that will be the site of a new cleanroom, shared workspaces, meeting rooms, and laboratories. The cleanroom facility, the partners said, will enable growth and synergy across numerous fields of shared interest, including photonics, quantum computing, nanomaterials, and chip manufacturing. The space will include analytical and production equipment in an open-access research laboratory that is to be available to TU/e as well as other research centers and industrial partners.

The planned facility will be the result of an estimated investment of several hundred million euros. It is intended to provide space for more than 500 researchers, including several hundred ASML employees.

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Published: April 2023

Glossary

cleanroom: An area in which airborne particulates can be monitored and controlled so that given size particles do not exceed a specified concentration, thereby eliminating potential dysfunctions in gyroscopes, ball bearings and other materials and lubricants.
lithography: Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
semiconductor: A semiconductor is a type of material that has electrical conductivity between that of a conductor and an insulator. In other words, semiconductors have properties that are intermediate between metals (good conductors of electricity) and insulators (poor conductors of electricity). The conductivity of a semiconductor can be controlled and modified by factors such as temperature, impurities, or an applied electric field. The most common semiconductors are crystalline solids, and they are...
integrated photonics: Integrated photonics is a field of study and technology that involves the integration of optical components, such as lasers, modulators, detectors, and waveguides, on a single chip or substrate. The goal of integrated photonics is to miniaturize and consolidate optical elements in a manner similar to the integration of electronic components on a microchip in traditional integrated circuits. Key aspects of integrated photonics include: Miniaturization: Integrated photonics aims to...

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