Chinese LED Manufacturer Orders Deposition Systems from Oxford Instruments

Oxford Instruments Nanotechnology Tools Ltd. said Chinese high-tech manufacturer Enraytek Optoelectronic Co. has ordered several PlasmaPro 800 plasma-enhanced chemical vapor deposition systems for the manufacture of high-brightness LEDs.

Oxford Instruments' large-capacity, open-loading PlasmaPro systems allow processing of wafers up to 300 mm. The devices are designed for the production of high-quality, uniform dielectric films in LED manufacturing.

The company designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications.