TEST, MEASUREMENT

Keithley Instruments Inc. has published a tutorial titled Overcoming the Measurement Challenges of Advanced Semiconductor Technologies: DC, Pulse, and RF — from Modeling to Manufacturing. Suitable for manufacturers as they move into the 65-nm technology mode, the 140-page handbook draws from the experience of the company’s parametric test and device-characterization experts. It covers such areas as charge pumping and reliability, high-frequency-capacitance measurement, DC measurements with source-measure units, and RF wafer, copper via and gate dielectric reliability testing. A glossary of commonly used terms in the semiconductor industry provides test and measurement terminology.