Imec Adds 4000-m2 Cleanroom for Integrated Circuit Production
LEUVEN, Belgium, March 16, 2016 — Nanoelectronics research center imec has announced the opening of a 4000-m2 cleanroom within its research facility, bringing its semiconductor research cleanroom space to a total of 12,000 m2. The cleanroom features all necessary 300-mm equipment to enable scaling of integrated circuits beyond 7 nm.
Imec’s research facility in Leuven, Belgium. Courtesy of imec.
The new facility complies with the latest standards in the semiconductor industry, and provides additional space for the advanced tools to lead innovations in device and system concepts, imec said. The organizations other production facilities include its bionanolabs, neuroelectronics labs, imaging and wireless and electronics test labs, photovoltaic pilot lines, and GaN-on-Si, Silicon photonics and microelectromechanical pilot lines.
The cleanroom was constructed by M+W, an internationally renowned contractor of large-scale high-tech infrastructure. The construction was completed in 20 months, and includes a reflecting facade, from architect Stéphane Beel, intended to integrate the building with the environment.
The new cleanroom comprises a total investment (building and equipment) of more than €1 billion, said imec, of which €100 million came from the Flemish government and more than €900 million from joint R&D investments with players from the entire semiconductor industry, for a total of more than 90 industrial partners.
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