SANTA CLARA, Calif., July 2, 2012 — Coherent Inc. has expanded its family of industrial ultrafast lasers with the Talisker 500, which delivers >10 W of ultraviolet output at 355 nm, 15 W of green output at 532 nm or 25 W of infrared output at 1064 nm.
The lasers increase repetition rate to 500 kHz, enabling higher throughput rates than earlier models delivered. The combination of 10-ps pulse duration and flexible wavelength options makes them suitable for precision micromachining applications in microelectronics and other industries where any peripheral laser damage — the heat affected zone (HAZ) — must be avoided, but where throughput is key. The rugged 1020 × 390 × 170-mm laser head, power supply and control interfaces mirror those of the current Talisker Ultra version, simplifying integration and/or upgrade.
Talisker 500 uses a combination of fiber and free-space laser technology. Reliability is enabled by a proprietary design and experience in building ultraviolet lasers for demanding industrial environments. The device’s dependability is also made possible by the comprehensive use of internally produced technologies, such as the company’s pump diode fiber array packages, based on aluminum-free active-area laser diodes.
The lasers are suitable for micromachining applications in industries involving delicate, thin-film and/or hard, wide-bandgap materials such as glass and ceramics. Examples in the semiconductor industry include silicon scribing and dicing, drilling of through silicon vias, and scribing of low-κ dielectrics. In LED fabrication, the lasers can be used for scribing sapphire substrates, while in solar and other industries, the absence of any HAZ makes the machining characteristics well-suited for scribing various thin films, including transparent conductive oxides.
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